Publication:
III-V Integrated Circuit Fabrication Technology
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Abstract
GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing.
Description
Authors
Tiku, Shiban
Biswas, Dhrubes
Alternate Authors
Advisor
Place of publication
Publisher
Jenny Stanford Publishing
Date
2015
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Keywords
Semiconductors , Integrated circuits , Microelectronics , Materials Science
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